| Topics | Characterization Methods | Execuation Date |
|---|---|---|
| Optical and Structure Properties of Hydrogenated amorphous SiGe | UV-NIR Spectrometry, FTIR, Thermal Effusion, etc. | 5/1996~1998. |
| Silicide Formation Kinetics - CoSi2 and NiSi | X-ray, TEM, Curvature Measurement, etc. | 8/1997~present. |
| Interconnect Reliability - Stresses of Cu Alloy during Thermal Cycling | X-ray, TEM, Curvature Measurement, etc. | 8/1996~present. |
| Metal induced Amorphous Si to Poly-Si transition | X-ray, TEM, Curvature Measurement, etc. | 8/1997~present. |
